Finite element analysis of a nonlinear parabolic equation modeling epitaxial thin-film growth
نویسندگان
چکیده
منابع مشابه
Modeling and Control of Epitaxial Thin Film Growth
Thin film deposition is a manufacturing process in which tolerances may approach the size of individual atoms. The final film is highly sensitive to the processing conditions, which can be intentionally manipulated to control film properties. A lattice model of surface evolution during thin film growth captures many important features, including the nucleation and growth of clusters of atoms an...
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ژورنال
عنوان ژورنال: Boundary Value Problems
سال: 2014
ISSN: 1687-2770
DOI: 10.1186/1687-2770-2014-46